The status of various types of vacuum pump equipment

Vacuum pump is a large amount of products, a large output, output value is not high, but it is indeed an essential basic product that directly affects the performance and quality of vacuum equipment. The vacuum pump market dynamically changes according to the needs of users. The main driving force for market growth comes from the rapid development of the semiconductor industry and the growing application of dry and molecular pumps.
At present, the global vacuum pump market has annual sales of about 2 billion U.S. dollars, and its annual growth rate is about 7%.
There are many manufacturers of vacuum pumps in China. The annual sales volume of all vacuum pumps is about RMB 150 million, which is equivalent to the annual sales of a vacuum pump from US Kinney Company. Through the analysis of the global vacuum pump market, we can see that the market and application fields of various vacuum pumps are constantly changing and developing. China's vacuum pump manufacturing industry has a long history and solid foundation. Domestic vacuum pumps have been applied and verified in various fields. Some pumps have also been exported to foreign countries and have received approval from foreign users. It should be said that China's vacuum pump manufacturing industry is at home and abroad. The market still has huge room for development.

1. Water ring vacuum pump Although the water ring vacuum pump is crude vacuum pump, it still has a large market in China's petroleum, chemical, electric power, textile, paper, pharmaceutical and other fields. Overseas, sales of water ring pumps account for 14% of the total vacuum pump market, second only to dry pumps, so Nash, Seimems and Kinney and other companies have invested in building factories or establishing sales networks in China, and continuously expand their market share in China. Since most of the water ring pumps are castings and the processing requirements are not high, they are labor-intensive products. Therefore, domestic water ring pumps have a competitive advantage in terms of price. The key is to improve the design, reduce the size, reduce the weight, increase the efficiency and reduce the energy. Consumption.

2. Spool valve pump Spool valve pump is a type of oil seal vacuum pump. Because the slide valve pump is more durable and reliable, all kinds of vacuum furnaces, coating machines and drying and dipping equipments at home and abroad use the slide valve pump as the foreline pump. However, the slide valve pump is heavy and has a large amount of processing work. All vacuum plants are looking for partners in China. In order to enable the domestic slide valve pump to enter the international market, it is necessary to further reduce the vibration and noise of the pump, eliminate fuel injection and oil leakage, and improve the reliability of the long-term operation of the slide valve pump.

3. Direct-connected rotary vane pump With the continuous expansion of vacuum technology in various application fields, the demand for direct-coupled rotary vane pumps is increasing. Due to the large number of such pumps, the processing and assembly work is very heavy, and the price is very low. Therefore, some foreign vacuum manufacturers establish specialized factories in China. Domestic small and medium-sized direct-connected rotary vane pumps have passed the technology and the price is far cheaper than that of foreign pumps. Therefore, domestic pumps still have competitive advantages. The key is to solve the performance and quality problems of shaft seal oil leakage, rotary vane material and vacuum pump oil. , To ensure that the direct pump in a high-speed, high-temperature performance, stable and reliable operation, but also to further improve the domestic direct-connected rotary vane pumping water vapor removal capabilities.

4. Roots vacuum pumps From the point of view of the production of foreign Roots vacuum pumps, several large foreign companies, such as Leybold, Balzers, Alcatell, Edwards and ULVAC, each of their roots pump sales accounted for the proportion of global Roots pump sales. No more than 5%, only 50% of the total of these 5, Roots pump production is not, but the price of foreign Roots pump is much higher than the domestic pump. At present, almost all large or small high vacuum and medium vacuum systems at home and abroad are equipped with Roots pumps in order to shorten pumping time and increase production efficiency. Therefore, domestic Roots pumps must try to enter the international market on the basis of occupying the domestic market. Therefore, it is necessary to further reduce the vibration noise of domestic Roots pumps, thoroughly solve the oil leakage problem of the shaft seal, improve the appearance quality of the pump, and improve the smoothness and cleanliness of the pump. In addition, it is also necessary to consider that the frequency of the power supply in some countries and regions is 60 Hz, and it is more important to ensure the reliability of Roots pumps in long-term operation with increased speed.
At present, domestic air-cooled vertical atmospheric Roots pumps are progressing rapidly and are technically mature. Since such a pump is equipped with a gas cooler below the exhaust port, a part of the cooled gas is returned to the pump chamber through the pipe to cool the rotor, so that the heat of compression is balanced, so that the pump can discharge air directly. In order to meet the requirements of different ultimate vacuum levels, the pump can be used in series. In general, an air-cooled vertical-flow Roots pump is added. The ultimate vacuum reached is an order of magnitude higher than that of the fore pump. This type of pump is actually a dry pump because it has no working medium in the pump chamber. At present, this type of air-cooled vertical Roots pumps and units have been tested for long-term operation on petroleum, chemical, plastics, pesticides, turbine rotor dynamic balance, aerospace spatial simulation and other devices, so they should be vigorously promoted at home. And applications.

5. Molecular pumps Molecular pumps are used in place of cryogenic pumps in many technological areas in the foreign semiconductor industry. In particular, sputter, etching, and LCVD devices use compound molecular pumps and traction pumps as main pumps.
Since the pumping speed of the molecular pump is only a quarter of the pump speed of the cryogenic pump with the same diameter, the exhaust time of the molecular pump is longer than that of the cryogenic pump. In order to increase the pumping speed, a low-temperature cold plate of -130°C to -150°C is installed on the inlet side of the molecular pump in foreign countries. This is called a low-temperature molecular pump. Water vapor is captured by a cryogenic plate, and other gases are pumped away by a molecular pump. The application of this low-temperature molecular pump on the vacuum coating device not only improves the production efficiency but also improves the film quality. With the rapid development of China's semiconductor industry, film industry and scientific research, molecular pumps should be the focus of China's vacuum pump manufacturing. First of all, the molecular pump must establish a complete series from small to large, and research and develop various molecular pumps, traction pumps and low-temperature molecular pumps to meet the needs of different occasions.

6. Dry mechanical vacuum pump The continuous growth of foreign dry mechanical vacuum pump market, its main driver comes from the rapid development of semiconductor industry, chemical industry, and film industry. In Japan, the semiconductor industry has used dry vacuum pumps instead of oil-sealed mechanical pumps. Over 45% of European and American semiconductor industries use dry vacuum pumps instead of oil-sealed mechanical pumps, which greatly improves the product's performance and quality. In order to meet the requirements of different application fields and different working conditions, there are multiple levels of Roots vacuum pumps, multi-stage claw vacuum pumps, screw vacuum pumps, scroll vacuum pumps, reciprocating piston vacuum pumps, and turbine oilless vacuum pumps. The ultimate pressure is from 10 Pa to 10-2 Pa, and the pumping speed is from 20 m3/h to 500 m3/h. According to statistics, the application of domestic dry pumps is currently less than 1%. The dry pumps used in the domestic semiconductor industry are all imported from abroad and their prices are very expensive.

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