[ China Instrument Network Instrument Development ] In today's information society, magnetic field sensors have become an indispensable basic element in the information technology and information industries.
Fig. 1(a) Basic structure of surface acoustic wave magnetic field sensor, (b) Response of sensor element, (c) Sensor element for deposition of gated iron-cobalt film
Fig. 2 Comparison of the sensor performance of deposited iron-cobalt film and grid array, (a) Hysteresis error test, (b) Sensitivity test
At present, people have developed magnetic field sensors using various physical, chemical, and biological effects, and have been widely used in scientific research, production, and social life, and have assumed the task of exploring various kinds of information. However, most magnetic field sensors still have problems in terms of sensitivity and hysteresis error, which hinders their practical application. Combining the high magnetic susceptibility, low hysteresis of lattice-type iron-cobalt (FeCo) magnetostrictive film with the fast response of surface acoustic waves, it is possible to realize a new type of fast, highly sensitive, low hysteresis error, stable and reliable. Magnetic field detection method to detect the magnetic field.
Institute of Acoustics, Chinese Academy of Sciences Research Center for Ultrasonic Technology Wang Wen, Ph.D. Jia Yana and others found that the grid-type design of iron-cobalt magnetostrictive film, you can obtain a new type of fast, high sensitivity magnetic field detection method to improve the magnetic field sensor The linearity, consistency, and stability reduce the hysteresis error, thereby improving the performance of the magnetic field sensor. Related results have been published in the international journal AIP advances.
In recent years, researchers have used magnetostrictive films as surface acoustic wave (SAW) sensors for sensitive films to provide new methods for designing magnetic field sensors. Wang Wen's research team has proposed a SAW device based on iron-cobalt film for sensing current/magnetic field. The sensitivity obtained by theoretical optimization is as high as 8.3 kHz / mT. However, the hysteresis effect* in the magnetostrictive film brings significant hysteresis error and significantly degrades the sensor performance.
This time, the researchers combined the grid-patterned iron cobalt magnetostrictive sensing film with surface acoustic waves to perform magnetic field sensing. The proposed sensor consists of a differential double-delay line oscillator, as shown in Figure 1.
The surface of the device on the sensing channel is deposited on the surface of the iron-cobalt film by RF sputtering technology and the engraved process, and the hysteresis effect is effectively suppressed by releasing the internal stress in the iron and cobalt. The device of the reference channel is used to effectively reduce the influence of the ambient temperature and the like by the differential method. When the magnetic field changes, the magnetostrictive effect* and the ΔE effect* of the iron-cobalt film cause a change in the SAW propagation velocity, and the intensity of the magnetic field to be measured can be represented by the change in the differential oscillation frequency signal.
The experimental results show that the magnetic hysteresis effect in iron and cobalt materials is successfully suppressed by the SAW magnetic field sensor using a Fe-Co grid array magnetic sensitive film, and the hysteresis error is only one-fifth that of the iron-cobalt film type sensor, and The sensitivity and linearity of the sensor have also been greatly improved, as shown in Figure 2. This research provides an effective way for high-performance magnetic field detection.
(Original Title: Successful Development of a New Surface Acoustic Wave Magnetic Field Sensor Based on Ferro Cobalt Magnetostrictive Sensing Film)
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